Authors: HUCK H JECH A HALAC EB NICOLAI J DEBENYACAR MAR RIGHINI R

Citation: H. Huck et al., MASS-SEPARATED ION-BEAM DEPOSITION OF DIAMOND-LIKE THIN-FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(1), 1994, pp. 62-66