Authors: WHIDDEN TK YANG SJ JENKINSGRAY A PAN M KOZICKI MN

Citation: Tk. Whidden et al., NANOSCALE LITHOGRAPHY OF SILICON DIOXIDE USING ELECTRON-BEAM PATTERNED CARBOXYLIC-ACIDS AS LOCALIZED ETCH INITIATORS, Journal of the Electrochemical Society, 144(2), 1997, pp. 605-616

Authors: KOZICKI MN ALLGAIR J JENKINSGRAY A FERRY DK WHIDDEN TK

Citation: Mn. Kozicki et al., THE USE OF ELECTRON-BEAM EXPOSURE AND CHEMICALLY ENHANCED VAPOR ETCHING OF SIO2 FOR NANOSCALE FABRICATION, Physica. B, Condensed matter, 227(1-4), 1996, pp. 318-322

Authors: WHIDDEN TK ALLGAIR J JENKINSGRAY A KHOURY M KOZICKI MN FERRY DK

Citation: Tk. Whidden et al., NANOSCALE LITHOGRAPHY WITH ELECTRON EXPOSURE OF SIO2 RESISTS, JPN J A P 1, 34(8B), 1995, pp. 4420-4425

Authors: WHIDDEN TK ALLGAIR J JENKINSGRAY A KOZICKI MN

Citation: Tk. Whidden et al., NANOSCALE SCANNING TUNNELING MICROSCOPE PATTERNING OF SILICON DIOXIDETHIN-FILMS BY CATALYZED HF VAPOR ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1337-1341