Authors: JOHANNES JE EKERDT JG

Citation: Je. Johannes et Jg. Ekerdt, RESONANCE-ENHANCED MULTIPHONON IONIZATION OF SILICON PRODUCED DURING DISILANE PYROLYSIS, Journal of applied physics, 76(5), 1994, pp. 3144-3148

Authors: JOHANNES JE EKERDT JG

Citation: Je. Johannes et Jg. Ekerdt, GAS-PHASE REACTION STUDY OF DISILANE PYROLYSIS - APPLICATIONS TO LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION, Journal of the Electrochemical Society, 141(8), 1994, pp. 2135-2140