Citation: Jw. Judy et al., MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES (VOL 4, PG 162, 1995), Journal of microelectromechanical systems, 5(1), 1996, pp. 73-73
Citation: Jw. Judy et Rs. Muller, MAGNETIC MICROACTUATION OF TORSIONAL POLYSILICON STRUCTURES, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 392-397
Citation: Jw. Judy et al., MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES, Journal of microelectromechanical systems, 4(4), 1995, pp. 162-169