Authors: JUPPO M VEHKAMAKI M RITALA M LESKELA M

Citation: M. Juppo et al., DEPOSITION OF MOLYBDENUM THIN-FILMS BY AN ALTERNATE SUPPLY OF MOCL5 AND ZN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 2845-2850

Authors: JUPPO M RITALA M LESKELA M

Citation: M. Juppo et al., DEPOSITION OF COPPER-FILMS BY AN ALTERNATE SUPPLY OF CUCL AND ZN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2330-2333