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Assessment of the adhesion quality of fusion-welded silicon wafers with nonlinear ultrasound
Authors:
Wegner, A Koka, A Janser, K Netzelmann, U Hirsekorn, S Arnold, W
Citation:
A. Wegner et al., Assessment of the adhesion quality of fusion-welded silicon wafers with nonlinear ultrasound, ULTRASONICS, 38(1-8), 2000, pp. 316-321
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