Authors: Patel, NS Miller, GA Guinn, C Sanchez, AC Jenkins, ST

Citation: Ns. Patel et al., Device dependent control of chemical-mechanical polishing of dielectric films, IEEE SEMIC, 13(3), 2000, pp. 331-343

Authors: Patel, NS Jenkins, ST

Citation: Ns. Patel et St. Jenkins, Adaptive optimization of run-to-run controllers: The EWMA example, IEEE SEMIC, 13(1), 2000, pp. 97-107