Authors: Yeh, WK Lin, YC Chen, TP Huang, CT Chang, SJ Lin, WJ Jung, LT Chien, SC Sun, SW Liou, FT

Citation: Wk. Yeh et al., A low thermal budget high performance 0.25-0.18 mu m merged logic device and dynamic random access memory application, JPN J A P 1, 39(4B), 2000, pp. 2162-2166