Authors: PINTASKE R WELZEL T SCHALLER M KAHL N HAHN J RICHTER F

Citation: R. Pintaske et al., SPECTROSCOPIC STUDIES OF A MAGNETRON SPUTTERING DISCHARGE FOR BORON-NITRIDE DEPOSITION, Surface & coatings technology, 99(3), 1998, pp. 266-273

Authors: PINTASKE R WELZEL T KAHL N SCHALLER M HAHN J RICHTER F

Citation: R. Pintaske et al., PROCESS DIAGNOSTICS DURING THE DEPOSITION OF CUBIC BORON-NITRIDE, Surface & coatings technology, 90(3), 1997, pp. 275-284

Authors: HAHN J FRIEDRICH M PINTASKE R SCHALLER M KAHL N ZAHN DRT RICHTER F

Citation: J. Hahn et al., CUBIC BORON-NITRIDE FILMS BY DC AND RF MAGNETRON SPUTTERING - LAYER CHARACTERIZATION AND PROCESS DIAGNOSTICS, DIAMOND AND RELATED MATERIALS, 5(10), 1996, pp. 1103-1112