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Results: 1
PHOSPHORUS DOPING OF SILICON BY PROTON-INDUCED NUCLEAR-REACTIONS
Authors:
ABRIL I GARCIAMOLINA R EROKHIN KM KALASHNIKOV NP
Citation:
I. Abril et al., PHOSPHORUS DOPING OF SILICON BY PROTON-INDUCED NUCLEAR-REACTIONS, Applied physics letters, 66(22), 1995, pp. 3036-3038
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