Authors: MAURER C KALLWEIT R BAUMANN H BETHGE K KRIMMEL EF

Citation: C. Maurer et al., IN-SITU DETECTION OF REARRANGEMENT PROCESSES DURING ELECTRON-BEAM ANNEALING OF ION-IMPLANTED INP, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 564-568