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Results: 1-10 |
Results: 10
A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE
Authors: SVEDIN N KALVESTEN E STEMME E STEMME G
Citation: N. Svedin et al., A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE, Journal of microelectromechanical systems, 7(3), 1998, pp. 303-308
NEW SMALL RADIUS JOINTS BASED ON THERMAL SHRINKAGE OF POLYIMIDE IN V-GROOVES FOR ROBUST SELF-ASSEMBLY 3D MICROSTRUCTURES
Authors: EBEFORS T KALVESTEN E STEMME G
Citation: T. Ebefors et al., NEW SMALL RADIUS JOINTS BASED ON THERMAL SHRINKAGE OF POLYIMIDE IN V-GROOVES FOR ROBUST SELF-ASSEMBLY 3D MICROSTRUCTURES, Journal of micromechanics and microengineering, 8(3), 1998, pp. 188-194
NEW CO2 FILTERS FABRICATED BY ANODIC BONDING AT OVERPRESSURE IN CO2 ATMOSPHERE
Authors: CORMAN T KALVESTEN E HUIKU M WECKSTROM K MERILAINEN P STEMME G
Citation: T. Corman et al., NEW CO2 FILTERS FABRICATED BY ANODIC BONDING AT OVERPRESSURE IN CO2 ATMOSPHERE, Sensors and actuators. A, Physical, 69(2), 1998, pp. 166-171
A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY
Authors: SVEDIN N KALVESTEN E STEMME E STEMME G
Citation: N. Svedin et al., A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 263-268
DYNAMIC ACTUATION OF POLYIMIDE V-GROOVE JOINTS BY ELECTRICAL HEATING
Authors: EBEFORS T KALVESTEN E STEMME G
Citation: T. Ebefors et al., DYNAMIC ACTUATION OF POLYIMIDE V-GROOVE JOINTS BY ELECTRICAL HEATING, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 199-204
AN INTEGRATED PRESSURE-FLOW SENSOR FOR CORRELATION-MEASUREMENTS IN TURBULENT GAS-FLOWS
Authors: KALVESTEN E VIEIDER C LOFDAHL L STEMME G
Citation: E. Kalvesten et al., AN INTEGRATED PRESSURE-FLOW SENSOR FOR CORRELATION-MEASUREMENTS IN TURBULENT GAS-FLOWS, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 51-58
SMALL SILICON PRESSURE TRANSDUCERS FOR SPACE-TIME CORRELATION-MEASUREMENTS IN A FLAT-PLATE BOUNDARY-LAYER
Authors: LOFDAHL L KALVESTEN E STEMME G
Citation: L. Lofdahl et al., SMALL SILICON PRESSURE TRANSDUCERS FOR SPACE-TIME CORRELATION-MEASUREMENTS IN A FLAT-PLATE BOUNDARY-LAYER, Journal of fluids engineering, 118(3), 1996, pp. 457-463
SMALL PIEZORESISTIVE SILICON MICROPHONES SPECIALLY DESIGNED FOR THE CHARACTERIZATION OF TURBULENT GAS-FLOWS
Authors: KALVESTEN E LOFDAHL L STEMME G
Citation: E. Kalvesten et al., SMALL PIEZORESISTIVE SILICON MICROPHONES SPECIALLY DESIGNED FOR THE CHARACTERIZATION OF TURBULENT GAS-FLOWS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 151-155
A SMALL-SIZE SILICON MICROPHONE FOR MEASUREMENTS IN TURBULENT GAS-FLOWS
Authors: KALVESTEN E LOFDAHL L STEMME G
Citation: E. Kalvesten et al., A SMALL-SIZE SILICON MICROPHONE FOR MEASUREMENTS IN TURBULENT GAS-FLOWS, Sensors and actuators. A, Physical, 45(2), 1994, pp. 103-108
SMALL SILICON-BASED PRESSURE TRANSDUCERS FOR MEASUREMENTS IN TURBULENT BOUNDARY-LAYERS
Authors: LOFDAHL L KALVESTEN E STEMME G
Citation: L. Lofdahl et al., SMALL SILICON-BASED PRESSURE TRANSDUCERS FOR MEASUREMENTS IN TURBULENT BOUNDARY-LAYERS, Experiments in fluids, 17(1-2), 1994, pp. 24-31
Risultati: 1-10 |