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Authors: MESTERS S KLINKHAMMER F DOLLE M KAPPIUS L MANTL S

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Authors: KLINKHAMMER F DOLLE M KAPPIUS L MANTL S

Citation: F. Klinkhammer et al., SUBMICROMETER PATTERNING OF COBALTDISILICIDE LAYERS BY LOCAL OXIDATION, Microelectronic engineering, 37-8(1-4), 1997, pp. 515-521