Authors: REVVA P KASTANAS A TRAVLOS A NASSIOPOULOU AG

Citation: P. Revva et al., HIGH CRYSTALLINE QUALITY TITANIUM DISILICIDES FORMED BY SPUTTER-DEPOSITION OF TI SI MULTILAYERS AND ANNEALING/, Vacuum, 51(3), 1998, pp. 335-337

Authors: REVVA P KASTANAS A NASSIOPOULOU AG

Citation: P. Revva et al., LAW SPECIFIC CONTACT RESISTIVITY TITANIUM SILICIDES ON N(-DEPOSITION OF TI() AND P(+) SILICON BY SPUTTER)SI MULTILAYERS AND ANNEALING/, Journal of the Electrochemical Society, 144(11), 1997, pp. 4072-4076