Authors: SACHDEV H KWONG R HUANG W KATNANI A SACHDEV K

Citation: H. Sachdev et al., NEW NEGATIVE TONE RESISTS FOR SUB-QUARTER MICRON LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 393-396

Authors: SACHDEV H KWONG R LINEHAN L CONLEY W MIURA S SMITH R KATNANI A

Citation: H. Sachdev et al., NEW NEGATIVE TONE RESISTS FOR SUBHALF MICRON LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 321-326

Authors: SACHDEV HS KWONG RW KATNANI A KWIETNIAK KT ROSENFIELD MG COANE PJ

Citation: Hs. Sachdev et al., IMPROVED UNDERLAYERS FOR ACID AMPLIFIED RESISTS, Microelectronic engineering, 23(1-4), 1994, pp. 327-330