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Citation: Mi. Current et al., MICROUNIFORMITY MEASUREMENTS OF ION-IMPLANTED SILICON, Solid state technology, 36(7), 1993, pp. 111

Authors: LARSON LA KEENAN WA JOHNSON WH

Citation: La. Larson et al., A SHEET RESISTANCE STANDARD FOR ION IMPLANT, Solid state technology, 36(10), 1993, pp. 67

Authors: YARLING CB JOHNSON WH KEENAN WA LARSON LA

Citation: Cb. Yarling et al., UNIFORMITY MAPPING IN ION-IMPLANTATION .2., Solid state technology, 35(3), 1992, pp. 29-32