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Citation: Wd. Munz et al., COMPARISON OF TIALN COATINGS GROWN BY UNBALANCED MAGNETRON AND ARC BOND SPUTTERING TECHNIQUES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2583-2589

Authors: MUNZ WD VANNISSELROY K TIETEMA R HURKMANS T KEIREN G

Citation: Wd. Munz et al., AN ALL-ROUND PERFORMER IN THE PHYSICAL VAPOR-DEPOSITION LABORATORY, Surface & coatings technology, 58(3), 1993, pp. 205-212