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Results: 26-27/27
Authors:
LOHNER T
KOTAI E
KHANH NQ
TOTH Z
FRIED M
VEDAM K
NGUYEN NV
HANEKAMP LJ
VANSILFHOUT A
Citation: T. Lohner et al., ION-IMPLANTATION INDUCED ANOMALOUS SURFACE AMORPHIZATION IN SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 335-339
Authors:
LOHNER T
TOTH Z
FRIED M
KHANH NQ
YANG GQ
LU LC
ZOU SC
HANEKAMP LJ
VANSILFHOUT A
GYULAI J
Citation: T. Lohner et al., COMPARATIVE INVESTIGATION OF DAMAGE-INDUCED BY DIATOMIC AND MONOATOMIC ION-IMPLANTATION IN SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 524-527