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YIELD-ORIENTED COMPUTER-AIDED DEFECT DIAGNOSIS
Authors: KHARE JB MARY W GRIEP S SCHMITTLANDSIEDEL D
Citation: Jb. Khare et al., YIELD-ORIENTED COMPUTER-AIDED DEFECT DIAGNOSIS, IEEE transactions on semiconductor manufacturing, 8(2), 1995, pp. 195-206
EXTRACTION OF DEFECT SIZE DISTRIBUTIONS IN AN IC LAYER USING TEST STRUCTURE DATA
Authors: KHARE JB MALY W THOMAS ME
Citation: Jb. Khare et al., EXTRACTION OF DEFECT SIZE DISTRIBUTIONS IN AN IC LAYER USING TEST STRUCTURE DATA, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 354-368
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