Jb. Khare et al., EXTRACTION OF DEFECT SIZE DISTRIBUTIONS IN AN IC LAYER USING TEST STRUCTURE DATA, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 354-368
This paper demonstrates the need for specialized test structures and a
lgorithms to obtain defect characteristics which are necessary for acc
urate yield prediction. Using one such specialized test structure, a g
eneral methodology for extracting size distribution parameters for bot
h shorts and opens in any IC layer, which is independent of defect and
yield models, is developed in this paper. The application of this met
hodology is illustrated by means of a fabrication experiment.