Authors: GERASIMENKO NN KHRYASHCHEV GS KURYSHEV GL MYASNIKOV AM OBODNIKOV VI

Citation: Nn. Gerasimenko et al., SIMS STUDY ON REDISTRIBUTION OF IMPLANTED IMPURITIES IN INSB AND INASDURING POSTIMPLANTATION ANNEALING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 111(3-4), 1996, pp. 281-284