Authors:
NOWOROLSKI JM
KLAASSEN EH
LOGAN JR
PETERSEN KE
MALUF NI
Citation: Jm. Noworolski et al., PROCESS FOR INPLANE AND OUT-OF-PLANE SINGLE-CRYSTAL-SILICON THERMAL MICROACTUATORS, Sensors and actuators. A, Physical, 55(1), 1996, pp. 65-69
Citation: Eh. Klaassen et al., DIODE-BASED THERMAL RMS CONVERTER WITH ON-CHIP CIRCUITRY FABRICATED USING CMOS TECHNOLOGY, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 33-40
Authors:
KLAASSEN EH
PETERSEN K
NOWOROLSKI JM
LOGAN J
MALUF NI
BROWN J
STORMENT C
MCCULLEY W
KOVACS GTA
Citation: Eh. Klaassen et al., SILICON FUSION BONDING AND DEEP REACTIVE ION ETCHING - A NEW TECHNOLOGY FOR MICROSTRUCTURES, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 132-139
Citation: Rj. Reay et al., A MICROMACHINED LOW-POWER TEMPERATURE-REGULATED BANDGAP VOLTAGE REFERENCE, IEEE journal of solid-state circuits, 30(12), 1995, pp. 1374-1381