Authors: DELLAGUARDIA R MALDONADO JR PREIN F ZELL T KLUWE A OERTEL HK

Citation: R. Dellaguardia et al., COMPARISON OF IMAGE SHORTENING EFFECTS IN X-RAY AND OPTICAL LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3936-3942