COMPARISON OF IMAGE SHORTENING EFFECTS IN X-RAY AND OPTICAL LITHOGRAPHY

Authors
DELLAGUARDIA R MALDONADO JR PREIN F ZELL T KLUWE A OERTEL HK
Citation
R. Dellaguardia et al., COMPARISON OF IMAGE SHORTENING EFFECTS IN X-RAY AND OPTICAL LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3936-3942
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3936 - 3942
Database
ISI
SICI code
1071-1023(1994)12:6<3936:COISEI>2.0.ZU;2-4