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Authors: KOFUJI N TSUJIMOTO K KUMIHASHI T TACHI S

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Authors: TSUJIMOTO K KUMIHASHI T KOFUJI N TACHI S

Citation: K. Tsujimoto et al., SHORT-GAS-RESIDENCE-TIME ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1209-1215