Authors: KOHLMANNVONPLATEN KT BRUENGER WH

Citation: Kt. Kohlmannvonplaten et Wh. Bruenger, ELECTRON-BEAM-INDUCED ETCHING OF RESIST WITH WATER-VAPOR AS THE ETCHING MEDIUM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4262-4266

Authors: KOHLMANNVONPLATEN KT CHLEBEK J WEISS M REIMER K OERTEL H BRUNGER WH

Citation: Kt. Kohlmannvonplaten et al., RESOLUTION LIMITS IN ELECTRON-BEAM-INDUCED TUNGSTEN DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2219-2223