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Authors:
KOHLMANNVONPLATEN KT
CHLEBEK J
WEISS M
REIMER K
OERTEL H
BRUNGER WH
Citation: Kt. Kohlmannvonplaten et al., RESOLUTION LIMITS IN ELECTRON-BEAM-INDUCED TUNGSTEN DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2219-2223