Authors: ARTEMIEV AN BUSHEVA IN KOLYASNIKOV VA KOVACHOV GA LATISH OE MARTYNENKO VV MORYAKOV VP NIKITIN BI ODINTSOV DG PEREDKOV SS RAKHIMBABAEV TY STANKEVITCH VG TZVID ES SCHMIDT A FEIERTAG B

Citation: An. Artemiev et al., DEEP X-RAY-LITHOGRAPHY BEAMLINE AT THE KURCHATOV SYNCHROTRON-RADIATION SOURCE - FIRST RESULTS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 405(2-3), 1998, pp. 496-499