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Results: 7
PHASE IDENTIFICATION OF MICRO AND MACRO BUBBLES AT THE INTERFACE OF DIRECTLY BONDED GAAS ON SAPPHIRE
Authors:
SENZ S
KOPPERSCHMIDT P
KASTNER G
HESSE D
Citation: S. Senz et al., PHASE IDENTIFICATION OF MICRO AND MACRO BUBBLES AT THE INTERFACE OF DIRECTLY BONDED GAAS ON SAPPHIRE, Journal of Materials Science, 33(8), 1998, pp. 2073-2077
Authors:
KOPPERSCHMIDT P
SENZ S
KASTNER G
HESSE D
GOSELE UM
Citation: P. Kopperschmidt et al., MATERIALS INTEGRATION OF GALLIUM-ARSENIDE AND SILICON BY WAFER BONDING, Applied physics letters, 72(24), 1998, pp. 3181-3183
Authors:
KOPPERSCHMIDT P
KASTNER G
SENZ S
HESSE D
GOSELE U
Citation: P. Kopperschmidt et al., WAFER BONDING OF GALLIUM-ARSENIDE ON SAPPHIRE, Applied physics A: Materials science & processing, 64(6), 1997, pp. 533-537
Authors:
KOPPERSCHMIDT P
KASTNER G
HESSE D
GOSELE UM
LORENZ M
Citation: P. Kopperschmidt et al., BACK-TO-BACK SUBSTRATE WAFER BONDING - A NEW APPROACH TO THE FABRICATION OF DOUBLE-SIDE COATED WAFERS, Applied physics A: Materials science & processing, 64(2), 1997, pp. 211-212
Authors:
SENZ S
KOPPERSCHMIDT P
LANGER E
SIEBER H
HESSE D
Citation: S. Senz et al., OPTIMIZATION OF THE WIRE-SHADOW TEM CROSS-SECTION PREPARATION TECHNIQUE, Ultramicroscopy, 70(1-2), 1997, pp. 23-28
Authors:
KOPPERSCHMIDT P
KASTNER G
HESSE D
ZAKHAROV ND
GOSELE U
Citation: P. Kopperschmidt et al., HIGH BOND-ENERGY AND THERMOMECHANICAL STRESS IN SILICON-ON-SAPPHIRE WAFER BONDING, Applied physics letters, 70(22), 1997, pp. 2972-2974
Authors:
KASTNER G
HESSE D
LORENZ M
SCHOLZ R
ZAKHAROV ND
KOPPERSCHMIDT P
Citation: G. Kastner et al., MICROCRACKS OBSERVED IN EPITAXIAL THIN-FILMS OF YBA2CU3O7-DELTA AND GDBA2CU3O7-DELTA, Physica status solidi. a, Applied research, 150(1), 1995, pp. 381-394
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