Authors:
CHURIN EG
KORONKEVICH VP
KULIPANOV GN
MAKAROV OA
MEZENTSEVA LA
NAZMOV VP
PINDYURIN VF
Citation: Eg. Churin et al., PRELIMINARY EXPERIENCE OF OPTICAL-ELEMENTS FABRICATION BY X-RAY-LITHOGRAPHY, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 359(1-2), 1995, pp. 412-414