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Authors: CHURIN EG KORONKEVICH VP KULIPANOV GN MAKAROV OA MEZENTSEVA LA NAZMOV VP PINDYURIN VF
Citation: Eg. Churin et al., PRELIMINARY EXPERIENCE OF OPTICAL-ELEMENTS FABRICATION BY X-RAY-LITHOGRAPHY, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 359(1-2), 1995, pp. 412-414

Authors: KORONKEVICH VP MIKHALTSOVA IA CHURIN EG YURLOV YI
Citation: Vp. Koronkevich et al., LENSACON, Applied optics, 34(25), 1995, pp. 5761-5772
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