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HARADA R
TANAKATAYA K
YAMANISHI K
NISHIKAWA T
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OHKUBO R
KOSUGA H
YAMAGUCHI Y
ANNAKA N
WELLS GM
YAMAZAKI K
CERRINA F
Citation: T. Shoki et al., ACCELERATED RADIATION-DAMAGE STUDIES OF ANTIREFLECTION MATERIALS ON SIC X-RAY MASK MEMBRANE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3995-4000