ACCELERATED RADIATION-DAMAGE STUDIES OF ANTIREFLECTION MATERIALS ON SIC X-RAY MASK MEMBRANE

Authors
SHOKI T OHKUBO R KOSUGA H YAMAGUCHI Y ANNAKA N WELLS GM YAMAZAKI K CERRINA F
Citation
T. Shoki et al., ACCELERATED RADIATION-DAMAGE STUDIES OF ANTIREFLECTION MATERIALS ON SIC X-RAY MASK MEMBRANE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3995-4000
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3995 - 4000
Database
ISI
SICI code
1071-1023(1994)12:6<3995:ARSOAM>2.0.ZU;2-B