Authors:
RANSOM CM
JACKSON TN
DEGELORMO JF
KOTECKI D
GRAIMANN C
SADANA DK
Citation: Cm. Ransom et al., ARSENIC GAS-PHASE DOPING OF POLYSILICON, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1390-1393