Authors: SCHRODEROEYNHAUSEN F BURKHARDT B FLADUNG T KOTTER F SCHNIEDERS A WIEDMANN L BENNINGHOVEN A

Citation: F. Schroderoeynhausen et al., QUANTIFICATION OF METAL CONTAMINANTS ON GAAS WITH TIME-OF-FLIGHT SECONDARY-ION MASS-SPECTROMETRY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1002-1006

Authors: KOTTER F BENNINGHOVEN A

Citation: F. Kotter et A. Benninghoven, SECONDARY-ION EMISSION FROM POLYMER SURFACES UNDER AR-BOMBARDMENT(, XE+ AND SF5+ ION), Applied surface science, 133(1-2), 1998, pp. 47-57