Authors:
SMIRNOV VK
LEPSHIN PA
KRIVELEVICH SA
KIBALOV DS
Citation: Vk. Smirnov et al., TOPOGRAPHY OF THE SILICON SURFACE BOMBARDED WITH NITROGEN-IONS AT VARIOUS ENERGIES AND ANGLES OF INCIDENCE, Inorganic materials, 34(11), 1998, pp. 1081-1084
Citation: Sa. Krivelevich et al., DIFFUSION OF GROUP-III AND GROUP-V ELEMENTS IN SILICON DURING SHORT-TERM HEAT-TREATMENT, Inorganic materials, 32(3), 1996, pp. 243-245