Authors: SCHLOTE J TITTELBACHHELMRICH K TILLACK B KUCK B HUNLICH T

Citation: J. Schlote et al., SYSTEMATIC CLASSIFICATION OF LPCVD PROCESSES, Journal de physique. IV, 5(C5), 1995, pp. 283-290

Authors: SCHLOTE J TITTELBACHHELMRICH K TILLACK B KUCK B HUNLICH T

Citation: J. Schlote et al., SYSTEMATIC CLASSIFICATION OF LPCVD PROCESSES, Journal de physique. IV, 5(C5), 1995, pp. 283-290

Authors: SCHLOTE J HINRICH S KUCK B SCHRODER KW

Citation: J. Schlote et al., TOPOLOGICAL EFFECTS REGARDING TRENCH STRUCTURES COVERED WITH LPCVD AND PECVD THIN-FILMS, Surface & coatings technology, 59(1-3), 1993, pp. 316-320