Authors: DUNCAN WM HENCK SA KUEHNE JW LOEWENSTEIN LM MAUNG S

Citation: Wm. Duncan et al., HIGH-SPEED SPECTRAL ELLIPSOMETRY FOR IN-SITU DIAGNOSTICS AND PROCESS-CONTROL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2779-2784