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Results: 26-50/60
Authors:
KUSHNER MJ
Citation: Mj. Kushner, ADVANCES IN PLASMA EQUIPMENT MODELING, Solid state technology, 39(6), 1996, pp. 135
Authors:
KUSHNER MJ
Citation: Mj. Kushner, EVOLUTION OF PLASMA EQUIPMENT MODELS, Solid state technology, 39(6), 1996, pp. 140
Authors:
KUSHNER MJ
COLLISON WZ
GRAPPERHAUS MJ
HOLLAND JP
BARNES MS
Citation: Mj. Kushner et al., A 3-DIMENSIONAL MODEL FOR INDUCTIVELY-COUPLED PLASMA-ETCHING REACTORS- AZIMUTHAL SYMMETRY, COIL PROPERTIES, AND COMPARISON TO EXPERIMENTS, Journal of applied physics, 80(3), 1996, pp. 1337-1344
Authors:
BARNES PN
KUSHNER MJ
Citation: Pn. Barnes et Mj. Kushner, FORMATION OF XEL(B) IN LOW-PRESSURE INDUCTIVE RADIO-FREQUENCY ELECTRIC-DISCHARGES SUSTAINED IN MIXTURES OF XE AND I-2, Journal of applied physics, 80(10), 1996, pp. 5593-5597
Authors:
GENTILE AC
KUSHNER MJ
Citation: Ac. Gentile et Mj. Kushner, MICROSTREAMER DYNAMICS DURING PLASMA REMEDIATION OF NO USING ATMOSPHERIC-PRESSURE DIELECTRIC BARRIER DISCHARGES, Journal of applied physics, 79(8), 1996, pp. 3877-3885
Authors:
TAN WY
HOEKSTRA RJ
KUSHNER MJ
Citation: Wy. Tan et al., A TIME-DEPENDENT PROPAGATOR METHOD FOR LONG MEAN FREE-PATH TRANSPORT OF NEUTRAL PARTICLES IN PLASMA PROCESSING REACTORS, Journal of applied physics, 79(7), 1996, pp. 3423-3431
Authors:
HOEKSTRA RJ
KUSHNER MJ
Citation: Rj. Hoekstra et Mj. Kushner, PREDICTIONS OF ION ENERGY-DISTRIBUTIONS AND RADICAL FLUXES IN RADIO-FREQUENCY BIASED INDUCTIVELY-COUPLED PLASMA-ETCHING REACTORS, Journal of applied physics, 79(5), 1996, pp. 2275-2286
Authors:
STOUT PJ
KUSHNER MJ
Citation: Pj. Stout et Mj. Kushner, MODELING OF HIGH-POWER SEMICONDUCTOR SWITCHES OPERATED IN THE NONLINEAR MODE, Journal of applied physics, 79(4), 1996, pp. 2084-2090
Authors:
HWANG HH
OLTHOFF JK
VANBRUNT RJ
RADOVANOV SB
KUSHNER MJ
Citation: Hh. Hwang et al., EVIDENCE FOR INELASTIC PROCESSES FOR N-3(-4(+) FROM ION ENERGY DISTRIBUTIONS IN HE() AND N)N-2 RADIO-FREQUENCY GLOW-DISCHARGES/, Journal of applied physics, 79(1), 1996, pp. 93-98
Authors:
COLLISON WZ
KUSHNER MJ
Citation: Wz. Collison et Mj. Kushner, ION DRAG EFFECTS IN INDUCTIVELY-COUPLED PLASMAS FOR ETCHING, Applied physics letters, 68(7), 1996, pp. 903-905
Authors:
HWANG HH
KUSHNER MJ
Citation: Hh. Hwang et Mj. Kushner, REGIMES OF PARTICLE TRAPPING IN INDUCTIVELY-COUPLED PLASMA PROCESSINGREACTORS, Applied physics letters, 68(26), 1996, pp. 3716-3718
Authors:
GENTILE AC
KUSHNER MJ
Citation: Ac. Gentile et Mj. Kushner, THE EFFECT OF CO2 ON THE PLASMA REMEDIATION OF NXOY, Applied physics letters, 68(15), 1996, pp. 2064-2066
Authors:
GENTILE AC
KUSHNER MJ
Citation: Ac. Gentile et Mj. Kushner, PLASMA REMEDIATION OF PERCHLOROETHYLENE IN HUMID GAS STREAMS, Journal of applied physics, 78(5), 1995, pp. 2977-2980
Authors:
GENTILE AC
KUSHNER MJ
Citation: Ac. Gentile et Mj. Kushner, REACTION CHEMISTRY AND OPTIMIZATION OF PLASMA REMEDIATION OF NXOY FROM GAS STREAMS, Journal of applied physics, 78(3), 1995, pp. 2074-2085
Authors:
HUANG FY
KUSHNER MJ
Citation: Fy. Huang et Mj. Kushner, A HYBRID MODEL FOR PARTICLE-TRANSPORT AND ELECTRON-ENERGY DISTRIBUTIONS IN POSITIVE-COLUMN ELECTRICAL DISCHARGES USING EQUIVALENT SPECIES TRANSPORT, Journal of applied physics, 78(10), 1995, pp. 5909-5918
Authors:
HOEKSTRA RJ
KUSHNER MJ
Citation: Rj. Hoekstra et Mj. Kushner, THE EFFECT OF SUBWAFER DIELECTRICS ON PLASMA PROPERTIES IN PLASMA-ETCHING REACTORS, Journal of applied physics, 77(8), 1995, pp. 3668-3673
Authors:
STOUT PJ
KUSHNER MJ
Citation: Pj. Stout et Mj. Kushner, CHARACTERISTICS OF AN OPTICALLY ACTIVATED PULSED-POWER GAAS(SI-CU) SWITCH OBTAINED BY 2-DIMENSIONAL MODELING, Journal of applied physics, 77(7), 1995, pp. 3518-3522
Authors:
VENTZEK PLG
GRAPPERHAUS M
KUSHNER MJ
Citation: Plg. Ventzek et al., INVESTIGATION OF ELECTRON SOURCE AND ION FLUX UNIFORMITY IN HIGH PLASMA-DENSITY INDUCTIVELY-COUPLED ETCHING TOOLS USING 2-DIMENSIONAL MODELING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3118-3137
Authors:
VENTZEK PLG
HOEKSTRA RJ
KUSHNER MJ
Citation: Plg. Ventzek et al., 2-DIMENSIONAL MODELING OF HIGH PLASMA-DENSITY INDUCTIVELY-COUPLED SOURCES FOR MATERIALS PROCESSING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 461-477
Authors:
SHOHET JL
WICKESBERG EB
KUSHNER MJ
Citation: Jl. Shohet et al., COMPUTER-SIMULATION OF MASS-SELECTIVE PLASMA-SOURCE ION-IMPLANTATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1380-1386
Authors:
CHOI SJ
KUSHNER MJ
Citation: Sj. Choi et Mj. Kushner, A PARTICLE-IN-CELL SIMULATION OF DUST CHARGING AND SHIELDING IN LOW-PRESSURE GLOW-DISCHARGES, IEEE transactions on plasma science, 22(2), 1994, pp. 138-150
Authors:
HARGIS PJ
GREENBERG KE
MILLER PA
GERARDO JB
TORCZYNSKI JR
RILEY ME
HEBNER GA
ROBERTS JR
OLTHOFF JK
WHETSTONE JR
VANBRUNT RJ
SOBOLEWSKI MA
ANDERSON HM
SPLICHAL MP
MOCK JL
BLETZINGER P
GARSCADDEN A
GOTTSCHO RA
SELWYN G
DALVIE M
HEIDENREICH JE
BUTTERBAUGH JW
BRAKE ML
PASSOW ML
PENDER J
LUJAN A
ELTA ME
GRAVES DB
SAWIN HH
KUSHNER MJ
VERDEYEN JT
HORWATH R
TURNER TR
Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154
Authors:
MASDEU JC
BRASS LM
HOLMAN L
KUSHNER MJ
Citation: Jc. Masdeu et al., BRAIN SINGLE-PHOTON EMISSION COMPUTED-TOMOGRAPHY, Neurology, 44(10), 1994, pp. 1970-1977
Authors:
CHOI SJ
KUSHNER MJ
Citation: Sj. Choi et Mj. Kushner, MUTUAL SHIELDING OF CLOSELY SPACED DUST PARTICLES IN LOW-PRESSURE PLASMAS, Journal of applied physics, 75(7), 1994, pp. 3351-3357
Authors:
SHON JW
KUSHNER MJ
Citation: Jw. Shon et Mj. Kushner, EXCITATION MECHANISMS AND GAIN MODELING OF THE HIGH-PRESSURE ATOMIC AR LASER IN HE AR MIXTURES/, Journal of applied physics, 75(4), 1994, pp. 1883-1890