Authors: KUWAHATA H UEHARA F MATSUMORI T MUTO N

Citation: H. Kuwahata et al., INVESTIGATION OF THE ANNEALING BEHAVIOR OF DAMAGE IN SI IMPLANTED INPBY PHOTOACOUSTIC AND RAMAN-SPECTROSCOPY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 459-462