Authors:
ROGACHEV NA
KUZNETSOV AN
TERUKOV EI
LEBEDEV AA
CHELNOKOV VE
Citation: Na. Rogachev et al., CHARACTERISTICS OF THE GROWTH OF SILICON- CARBIDE EPITAXIAL LAYERS FROM GAS-PHASE PRODUCED BY MAGNETOTRON REACTIVE SPUTTERING, Pis'ma v Zurnal tehniceskoj fiziki, 20(7), 1994, pp. 51-54
Authors:
ANDREEV AN
BABANIN AI
KUZNETSOV AN
RASTEGAEVA MG
TERUKOV EI
CHELNOKOV VE
SHCHEGLOV MP
Citation: An. Andreev et al., OHMIC CONTACTS TO SIC-6H OF N-TYPE CONDUC TIVITY BASED SIC THIN-FILMSDEPOSITED BY THE MAGNETOTRON SPUTTERING TECHNIQUE, Pis'ma v Zurnal tehniceskoj fiziki, 20(18), 1994, pp. 11-15