Authors:
OSULLIVAN EJ
COOPER EI
ROMANKIW LT
KWIETNIAK KT
TROUILLOUD PL
HORKANS J
JAHNES CV
BABICH IV
KRONGELB S
HEGDE SG
TORNELLO JA
LABIANCA NC
COTTE JM
CHAINER TJ
Citation: Ej. Osullivan et al., INTEGRATED, VARIABLE-RELUCTANCE MAGNETIC MINIMOTOR, IBM journal of research and development, 42(5), 1998, pp. 681-694
Citation: Mg. Rosenfield et al., ELECTRON-BEAM LITHOGRAPHY FOR ADVANCED DEVICE PROTOTYPING - PROCESS TOOL METROLOGY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2615-2620