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Authors: MACHIDA K KYURAGI H AKIYA H IMAI K TOUNAI A NAKASHIMA A

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Authors: KYURAGI H

Citation: H. Kyuragi, ROLE OF LOW-ENERGY SECONDARY ELECTRONS IN SYNCHROTRON RADIATION-EXCITED CHEMICAL-VAPOR-DEPOSITION OF SILICON-NITRIDE FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(5), 1997, pp. 2644-2652

Authors: HIRATA A HOSOYA T MACHIDA K KYURAGI H AKIYA H

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Authors: KYURAGI H

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Authors: KONAKA S KYURAGI H KOBAYASHI T DEGUCHI K YAMAMOTO E OHKI S YAMAMOTO Y

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