Authors:
McDonald, A
Mahaffy, R
Wang, XD
Kuklewicz, C
Shih, CK
Dennis, M
Tiffin, D
Kadoch, D
Duane, M
Citation: A. Mcdonald et al., Quantitative two-dimensional profiling of 0.35 mu m transistors with lightly doped drain structures, J VAC SCI B, 18(1), 2000, pp. 572-575