Authors: Komarov, FF Kamyshan, AS Mironov, AM Lagutin, AE Martynov, IS

Citation: Ff. Komarov et al., Formation of device isolation in GaAs with polyenergetic ion implantation, VACUUM, 63(4), 2001, pp. 577-579

Authors: Komarov, FF Kamyshan, AS Mironov, AM

Citation: Ff. Komarov et al., Formation of horizontal and vertical insulation in semiconductors by ion implantation, NUKLEONIKA, 44(2), 1999, pp. 201-206