Authors: Kapels, H Aigner, R Binder, J

Citation: H. Kapels et al., Fracture strength and fatigue of polysilicon determined by a novel thermalactuator, IEEE DEVICE, 47(7), 2000, pp. 1522-1528

Authors: Schrag, G Zelder, G Kapels, H Wachutka, G

Citation: G. Schrag et al., Numerical and experimental analysis of distributed electromechanical parasitics in the calibration of a fully BiCMOS-integrated capacitive pressure sensor, SENS ACTU-A, 76(1-3), 1999, pp. 19-25

Authors: Hierold, C Clasbrummel, B Behrend, D Scheiter, T Steger, M Oppermann, K Kapels, H Landgraf, E Wenzel, D Etzrodt, D

Citation: C. Hierold et al., Low power integrated pressure sensor system for medical applications, SENS ACTU-A, 73(1-2), 1999, pp. 58-67