Authors: Armacost, M Hoh, PD Wise, R Yan, W Brown, JJ Keller, JH Kaplita, GA Halle, SD Muller, KP Naeem, MD Srinivasan, S Ng, HY Gutsche, M Gutmann, A Spuler, B

Citation: M. Armacost et al., Plasma-etching processes for ULSI semiconductor circuits, IBM J RES, 43(1-2), 1999, pp. 39-72