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The effects of metal ion post-implantation on the near surface properties of TiN deposited by CVD
Authors:
Perry, AJ Manory, RR Ward, LP Kavuri, PP
Citation:
Aj. Perry et al., The effects of metal ion post-implantation on the near surface properties of TiN deposited by CVD, SURF COAT, 133, 2000, pp. 203-207
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