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Citation: R. Spolenak et al., The preparation of TEM-specimens using Focused Ion Beam (FIB) systems, PRAKT METAL, 37(2), 2000, pp. 90-101

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Authors: Marien, J Plitzko, JM Spolenak, R Keller, RM Mayer, J

Citation: J. Marien et al., Quantitative electron spectroscopic imaging studies of microelectronic metallization layers, J MICROSC O, 194, 1999, pp. 71-78