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Dielectric properties of RF plasma-deposited a-C : H and a-C : H : N films
Authors:
Romanko, LA Gontar, AG Kutsay, AM Khandozko, SI Gorokhov, VY
Citation:
La. Romanko et al., Dielectric properties of RF plasma-deposited a-C : H and a-C : H : N films, DIAM RELAT, 9(3-6), 2000, pp. 801-804
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