Authors:
Lysenko, VS
Nazarov, AN
Kilchytska, VI
Osiyuk, IN
Tyagulski, IP
Gomeniuk, YV
Barchuk, IP
Citation: Vs. Lysenko et al., Thermally activated processes in the buried oxide of SIMOX SOI structures and devices, SOL ST ELEC, 45(4), 2001, pp. 575-584
Authors:
Nazarov, AN
Kilchytska, VI
Barchuk, IP
Tkachenko, AS
Ashok, S
Citation: An. Nazarov et al., Radio frequency plasma annealing of positive charge generated by Fowler-Nordheim electron injection in buried oxides in silicon, J VAC SCI B, 18(3), 2000, pp. 1254-1261