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Results: 1-2 |
Results: 2
Thin film transistors fabricated by in situ doped unhydrogenated polysilicon films obtained by solid phase crystallization
Authors: Pichon, L Mourgues, K Raoult, F Mohammed-Brahim, T Kis-Sion, K Briand, D Bonnaud, O
Citation: L. Pichon et al., Thin film transistors fabricated by in situ doped unhydrogenated polysilicon films obtained by solid phase crystallization, SEMIC SCI T, 16(11), 2001, pp. 918-924
In situ doping of silicon deposited by LPCVD: pressure influence on dopantincorporation mechanisms
Authors: Briand, D Sarret, M Kis-Sion, K Mohammed-Brahim, T Duverneuil, P
Citation: D. Briand et al., In situ doping of silicon deposited by LPCVD: pressure influence on dopantincorporation mechanisms, SEMIC SCI T, 14(2), 1999, pp. 173-180
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